00747pamaa2200229 4500 0000044159 20121212090000.0 080908 eng 047186109X TK7875 GAR 2001 Gardner Microsensors, MEMS, and smart devices Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. Chichester: New York : J. Wiley, 2001. xvi, 503 p.: ill.; 25 cm. FOEAT Includes bibliographical references and index Detectors Intelligent control systems Microelectromechanical systems Varadan, V.K. Awadelkarim, Osama O. www.wiley.com