Microsensors, MEMS, and smart devices

Main Author: Gardner
Other Authors: Varadan,, Awadelkarim,
Format: Book
Language:English
Published: Chichester: New York : J. Wiley, 2001.
Subjects:
LEADER 00747pamaa2200229 4500
001 0000044159
005 20121212090000.0
008 080908 eng
020 0 0 |a 047186109X  
090 0 0 |a TK7875   |b GAR 2001 
100 1 0 |a Gardner  
245 1 0 |a Microsensors, MEMS, and smart devices   |c Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. 
260 0 0 |a Chichester:   |b New York : J. Wiley,   |c 2001. 
300 |a xvi, 503 p.:   |b ill.;   |c 25 cm. 
501 0 0 |a FOEAT 
504 0 0 |a Includes bibliographical references and index 
650 0 0 |a Detectors  
650 0 0 |a Intelligent control systems  
650 0 0 |a Microelectromechanical systems  
700 1 1 |a Varadan,   |h V.K.  
700 1 1 |a Awadelkarim,   |h Osama O.  
901 |u www.wiley.com