Description: Microsensors, MEMS, and smart devices

Main Author:	Gardner
Other Authors:	Varadan,, Awadelkarim,
Format:	Book
Language:	English
Published:	Chichester: New York : J. Wiley, 2001.
Subjects:	Detectors Intelligent control systems Microelectromechanical systems

Physical Description:	xvi, 503 p.: ill.; 25 cm.
Bibliography:	Includes bibliographical references and index
ISBN:	047186109X