00796pamaa2200217 4500 0000044158 20121212090000.0 080908 eng 0471784060 TK7871.85 MAY 2006 May Fundamentals of semiconductor manufacturing and process control Gary S. May, Costas J. Spanos. [Piscataway] : IEEE ; Hoboken, N.J.: Wiley-Interscience, 2006. xix, 463 p.: ill.; 25 cm. FOEAT Includes bibliographical references and index Integrated circuits -- Design and construction Semiconductors -- Design and construction Process control -- Statistical methods Spanos, Costas J. www.wiley.com