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| LEADER |
00796pamaa2200217 4500 |
| 001 |
0000044158 |
| 005 |
20121212090000.0 |
| 008 |
080908 eng |
| 020 |
0 |
0 |
|a 0471784060
|
| 090 |
0 |
0 |
|a TK7871.85
|b MAY 2006
|
| 100 |
1 |
0 |
|a May
|
| 245 |
1 |
0 |
|a Fundamentals of semiconductor manufacturing and process control
|c Gary S. May, Costas J. Spanos.
|
| 260 |
0 |
0 |
|a [Piscataway] : IEEE ; Hoboken, N.J.:
|b Wiley-Interscience,
|c 2006.
|
| 300 |
|
|
|a xix, 463 p.:
|b ill.;
|c 25 cm.
|
| 501 |
0 |
0 |
|a FOEAT
|
| 504 |
0 |
0 |
|a Includes bibliographical references and index
|
| 650 |
0 |
0 |
|a Integrated circuits --
|x Design and construction
|
| 650 |
0 |
0 |
|a Semiconductors --
|x Design and construction
|
| 650 |
0 |
0 |
|a Process control --
|x Statistical methods
|
| 700 |
1 |
1 |
|a Spanos,
|h Costas J.
|
| 901 |
|
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|u www.wiley.com
|
