Fundamentals of semiconductor manufacturing and process control
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
[Piscataway] : IEEE ; Hoboken, N.J.:
Wiley-Interscience,
2006.
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| Subjects: |
| Physical Description: | xix, 463 p.: ill.; 25 cm. |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0471784060 |