May, & Spanos. (2006). Fundamentals of semiconductor manufacturing and process control. [Piscataway] : IEEE ; Hoboken, N.J.: Wiley-Interscience.
Chicago Style CitationMay, and Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. [Piscataway] : IEEE ; Hoboken, N.J.: Wiley-Interscience, 2006.
MLA CitationMay, and Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. [Piscataway] : IEEE ; Hoboken, N.J.: Wiley-Interscience, 2006.
Warning: These citations may not always be 100% accurate.