APA Citation

May, & Spanos. (2006). Fundamentals of semiconductor manufacturing and process control. [Piscataway] : IEEE ; Hoboken, N.J.: Wiley-Interscience.

Chicago Style Citation

May, and Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. [Piscataway] : IEEE ; Hoboken, N.J.: Wiley-Interscience, 2006.

MLA Citation

May, and Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. [Piscataway] : IEEE ; Hoboken, N.J.: Wiley-Interscience, 2006.

Warning: These citations may not always be 100% accurate.