Thin-film depostion : principles and practice
| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
Boston:
McGraw Hill,
1995.
|
| Subjects: |
| LEADER | 00459pamaa2200169 4500 | ||
|---|---|---|---|
| 001 | 0000031619 | ||
| 005 | 20060606090000.0 | ||
| 020 | 0 | 0 | |a 0071139133 |
| 082 | |a 621.3815 SMI | ||
| 090 | 0 | 0 | |a TA418.9T45 |b SMI 1995 |
| 100 | 1 | 0 | |a SMITH |
| 245 | 1 | 0 | |a Thin-film depostion : |b principles and practice |c Donald L. Smith. |
| 260 | 0 | 0 | |a Boston: |b McGraw Hill, |c 1995. |
| 300 | |a xxiii, 616p.; |c 23cm. | ||
| 650 | 0 | 0 | |a Thin films |
| 650 | 0 | 0 | |a Vapor-plating |
| 650 | 0 | 0 | |a Thin film devices |