Introduction to semiconductor manufacturing technology
| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
New Jersey:
Prentice Hall,
2001.
|
| Subjects: |
| LEADER | 00489pamaa2200157 4500 | ||
|---|---|---|---|
| 001 | 0000029344 | ||
| 005 | 20060606090000.0 | ||
| 020 | 0 | 0 | |a 0130224049 |
| 082 | |a 621.38152 HON 2001 | ||
| 090 | 0 | 0 | |a TK7871.85 |b HON 2001 |
| 100 | 1 | 0 | |a HONG XIAO |
| 245 | 1 | 0 | |a Introduction to semiconductor manufacturing technology |c Hong Xiao. |
| 260 | 0 | 0 | |a New Jersey: |b Prentice Hall, |c 2001. |
| 300 | |a viii, 643p.: |b ill.; |c 26cm. | ||
| 650 | 0 | 0 | |a Semiconductor industry |
| 650 | 0 | 0 | |a Semiconductors -- |x Design and construction |