An introduction to semiconductor microtechnology
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Published: |
Chichester:
John Wiley,
1990.
|
| Edition: | 2nd ed. |
| Subjects: |
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| 090 | 0 | 0 | |a TK7871.85 |b MOR 1990 |
| 100 | 1 | 0 | |a MORGAN |
| 245 | 1 | 0 | |a An introduction to semiconductor microtechnology |c D.V. Morgan, K. Board. |
| 250 | 0 | 0 | |a 2nd ed. |
| 260 | 0 | 0 | |a Chichester: |b John Wiley, |c 1990. |
| 300 | |a xiv, 208p.: |b ill.; |c 23cm. | ||
| 650 | 0 | 0 | |a Semiconductor -- |x Design and construction |
| 700 | 1 | 1 | |a BOARD, |h K |