Mechanics of microelectronics
| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Dordrecht:
Springer,
2006.
|
| Series: | Solid mechanics and its applications ; v. 141
|
| Subjects: |
| Physical Description: | xiii, 563 p.: ill.; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index Includes bibliographical references |
| ISBN: | 140204934X |