00539pamaa2200169 4500 0000017597 20060606090000.0 0442010796 621.38152 SIV TK7836 SIV 1995 SIVARAM Chemical vapor deposition : thermal and plasma deposition of electronic materials S. Sivaram. New York: Van Nostrand Reinhold, 1995. xi, 292p.: 24cm. Microelectronics industry Chemical vapor deposition Microelectronics -- Materials