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Chemical vapor deposition :
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Chemical vapor deposition : thermal and plasma deposition of electronic materials
Main Author:
SIVARAM
Format:
Book
Published:
New York:
Van Nostrand Reinhold,
1995.
Subjects:
Microelectronics industry
Chemical vapor deposition
Microelectronics --
>
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Physical Description:
xi, 292p.: 24cm.
ISBN:
0442010796
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