SIVARAM. (1995). Chemical vapor deposition: Thermal and plasma deposition of electronic materials. New York: Van Nostrand Reinhold.
Chicago Style CitationSIVARAM. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. New York: Van Nostrand Reinhold, 1995.
MLA CitationSIVARAM. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. New York: Van Nostrand Reinhold, 1995.
Warning: These citations may not always be 100% accurate.