APA Citation

SIVARAM. (1995). Chemical vapor deposition: Thermal and plasma deposition of electronic materials. New York: Van Nostrand Reinhold.

Chicago Style Citation

SIVARAM. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. New York: Van Nostrand Reinhold, 1995.

MLA Citation

SIVARAM. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. New York: Van Nostrand Reinhold, 1995.

Warning: These citations may not always be 100% accurate.