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Chemical vapor deposition :
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Chemical vapor deposition : thermal and plasma deposition of electronic materials
Main Author:
SIVARAM
Format:
Book
Published:
New York:
Van Nostrand Reinhold,
1995.
Subjects:
Microelectronics industry
Chemical vapor deposition
Microelectronics --
>
Materials
Holdings
Description
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TSAM LIBRARY
Call Number:
TK7836 SIV 1995
Accession
Item Category
Format
Status
Notes
0000015545
Open Shelf
Monographs
AVAILABLE
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