rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: ULSI technology
    sub title: edited by C.Y. Chang and S.M. Sze
  name:
    name part: CHANG C.Y.
  name:
    name part: Sze S.M.
  type of resource: text
  origin info:
    place:
      place term: New York
    publisher: McGraw Hill
    date issued: 1996
    issuance: monographic
  physical description:
    extent: xxv, 726p.: 23cm.
  subject:
    topic: Ultralarge-scale integration
  classification: 621.395 ULS 1996
  identifier: 0071141057
  record info:
    record change date: 20060616090000.0
    record identifier: 0000016680