rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microchip fabrication
    sub title: a practical guide to semiconductor processing
  name:
    name part: VAN ZANT
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: New York
    publisher: McGraw Hill
    date issued: 1997
    edition: 3rd ed.
    issuance: monographic
  physical description:
    extent: xvi, 623p.: 24cm.
  note: Peter Van Zant.
  subject:
    topic: Semiconductors --
    topic: Design and construction
  classification: 621.38152 VAN
  identifier: 0070672504
  record info:
    record change date: 20060606090000.0
    record identifier: 0000014638