Microchip fabrication : a practical guide to semiconductor processing
Main Author: | |
---|---|
Format: | Book |
Published: |
New York:
McGraw Hill,
1997.
|
Edition: | 3rd ed. |
Subjects: |
LEADER | 00476pamaa2200157 4500 | ||
---|---|---|---|
001 | 0000014638 | ||
005 | 20060606090000.0 | ||
020 | 0 | 0 | |a 0070672504 |
082 | |a 621.38152 VAN | ||
090 | 0 | 0 | |a TK7871.85 |b VAN 1997 |
100 | 1 | 0 | |a VAN ZANT |
245 | 1 | 0 | |a Microchip fabrication : |b a practical guide to semiconductor processing |c Peter Van Zant. |
250 | 0 | 0 | |a 3rd ed. |
260 | 0 | 0 | |a New York: |b McGraw Hill, |c 1997. |
300 | |a xvi, 623p.: |b 24cm. | ||
650 | 0 | 0 | |a Semiconductors -- |x Design and construction |