00511pamaa2200145 4500 0000014238 20060629090000.0 0792398343 670 SOL 1997 TS155.6 SOL 1997 SOLID freeform fabrication : a new direction in manufacturing with a research and applications in thermal laser processing Joseph J. Beaman ... [et al.]. Dordrecht: Kluwer Academic Pub., 1997. 330p.: 26cm. Wafer fabrication Manufacturing processes