00530pamaa2200169 4500 0000012245 20060607090000.0 0071007962 621.3815 LEE 1990 TK7874 LEE 1990 LEE Fundamentals of microelectronics processing Hong H. Lee. New York: McGraw Hill, 1990. xvi, 514p.: 24cm. McGraw Hill chemical engineering series Integrated circuits -- Materials Integrated circuits -- Design and construction