Fundamentals of microelectronics processing
| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
New York:
McGraw Hill,
1990.
|
| Series: | McGraw Hill chemical engineering series
|
| Subjects: |
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| 005 | 20060607090000.0 | ||
| 020 | 0 | 0 | |a 0071007962 |
| 082 | |a 621.3815 LEE 1990 | ||
| 090 | 0 | 0 | |a TK7874 |b LEE 1990 |
| 100 | 1 | 0 | |a LEE |
| 245 | 1 | 0 | |a Fundamentals of microelectronics processing |c Hong H. Lee. |
| 260 | 0 | 0 | |a New York: |b McGraw Hill, |c 1990. |
| 300 | |a xvi, 514p.: |b 24cm. | ||
| 440 | 0 | 0 | |a McGraw Hill chemical engineering series |
| 650 | 0 | 0 | |a Integrated circuits -- |x Materials |
| 650 | 0 | 0 | |a Integrated circuits -- |x Design and construction |